Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies
Author: Markku Tilli,Mervi Paulasto-Krockel,Veli-Matti Airaksinen,Sami Franssila,Veikko Lindroos,Ari Lehto,Teruaki Motooka
Publsiher: Elsevier
Total Pages: 668
Release: 2009-12-08
Genre: Technology & Engineering
ISBN: 0815519885

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A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materials characterization Modeling in MEMS Measuring MEMS Micromachining technologies in MEMS Encapsulation of MEMS components Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures

Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies
Author: Markku Tilli,Mervi Paulasto-Kröckel,Matthias Petzold,Horst Theuss,Teruaki Motooka,Veikko Lindroos
Publsiher: Elsevier
Total Pages: 1026
Release: 2020-04-17
Genre: Technology & Engineering
ISBN: 9780128177877

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Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

Developments in Surface Contamination and Cleaning Methods for Surface Cleaning

Developments in Surface Contamination and Cleaning  Methods for Surface Cleaning
Author: Rajiv Kohli,Kashmiri L. Mittal
Publsiher: William Andrew
Total Pages: 212
Release: 2016-11-04
Genre: Technology & Engineering
ISBN: 9780323431729

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Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning, Volume 9, part of the Developments in Surface Contamination and Cleaning series provide a state-of-the-art guide to the current knowledge on the behavior of film-type and particulate surface contaminants and their associated cleaning methods. This newest volume in the series discusses methods of surface cleaning of contaminants and the resources that are needed to deal with them. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales. Provides a comprehensive coverage of innovations in surface cleaning Written by established experts in the surface cleaning field, presenting an authoritative resource Contains a comprehensive review of the state-of-the-art, including case studies to enhance the learning process

Flexible Sensors for Energy Harvesting Applications

Flexible Sensors for Energy Harvesting Applications
Author: Anindya Nag
Publsiher: Springer Nature
Total Pages: 135
Release: 2022
Genre: Electronic Book
ISBN: 9783030996000

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Advanced Materials Research Vol 1170

Advanced Materials Research Vol  1170
Author: Alan Kin Tak Lau
Publsiher: Trans Tech Publications Ltd
Total Pages: 178
Release: 2022-04-19
Genre: Science
ISBN: 9783036410456

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This volume of the "Advanced Materials Research" journal includes papers reflecting research results in developing new materials and investigating their properties. The covered topics comprise assessment of the algorithm of surface defect classification in silicon wafer manufacturing, designing and simulation of a color-tunable light-emitting diode with two laterally arranged single quantum wells, defect evolution in laser remelting of thermally sprayed coating, analysis of corrosion behavior of welded joint aluminum alloy in simulated marine atmosphere environment, results of an experimental study into thermal behavior of micro friction stir welded joints of aluminum and copper sheets. Some articles demonstrate the review of mechanical properties of foamed cellular concrete and fire retardant materials, the study of properties of materials that are based on the natural fiber, and analysis of technologies of surface water treatment and absorption of various pharmaceutical compounds. The papers collected in this volume will be helpful for professionals in various engineering fields, students, and academic staff.

Inkjet Printing in Industry

Inkjet Printing in Industry
Author: Werner Zapka
Publsiher: John Wiley & Sons
Total Pages: 1872
Release: 2022-10-10
Genre: Technology & Engineering
ISBN: 9783527347803

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A landmark reference on industrial-scale inkjet printing This handbook provides an indispensable overview of all essential aspects of industrial-scale inkjet printing. Inkjet printing, as a scalable deposition technique, has grown in popularity due to its being additive, digital, and contact-free. Given these advantages, the technology can now be used in stable and mature industrial-scale applications, for example, in the electronics and sensors industry. As the mechanisms for inkjet printing have improved, so too have the versatility and applicability of this machinery within industry. The handbook’s coverage includes, but is not limited to, inks, printhead technology, substrates, metrology, software, as well as machine integration and pre-and postprocessing approaches. This information is complemented by an overview of printing strategies and application development and provides a review of novel technological advances, such as printed electronics, robotics, 3D printing, and bioprinting. Readers will also find: * The most comprehensive work on the topic with over 75 chapters and more than 1,500 pages relating to inkjet printing technology * The inkjet-printing expertise of academic researchers and corporate development engineers in one manual * A hands-on approach utilizing case studies, success stories, and practical hints that allow the reader direct, first-hand experience with the power of inkjet printing technology The ideal resource for material scientists, engineering scientists in industry, electronic engineers, and surface and solid-state chemists, Inkjet Printing in Industry is an all-in-one tool for modern professionals and researchers alike.

Modern Trends in Materials Processing

Modern Trends in Materials Processing
Author: Sergey Bratan,Stanislav Roshchupkin
Publsiher: Trans Tech Publications Ltd
Total Pages: 1184
Release: 2022-02-15
Genre: Science
ISBN: 9783035721492

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Selected peer-reviewed full text papers from the 5th International Conference on Modern Trends in Manufacturing Technologies and Equipment (ICMTMTE 2021)

MEMS Materials and Processes Handbook

MEMS Materials and Processes Handbook
Author: Reza Ghodssi,Pinyen Lin
Publsiher: Springer Science & Business Media
Total Pages: 1188
Release: 2011-03-18
Genre: Technology & Engineering
ISBN: 9780387473185

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MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Handbook of Humidity Measurement Volume 1

Handbook of Humidity Measurement  Volume 1
Author: Ghenadii Korotcenkov
Publsiher: CRC Press
Total Pages: 372
Release: 2018-03-15
Genre: Science
ISBN: 9781351400657

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The first volume of The Handbook of Humidity Measurement focuses on the review of devices based on optical principles of measurement such as optical UV, fluorescence hygrometers, optical and fiber-optic sensors of various types. Numerous methods for monitoring the atmosphere have been developed in recent years, based on measuring the absorption of electromagnetic field in different spectral ranges. These methods, covering the optical (FTIR and Lidar techniques), as well as a microwave and THz ranges are discussed in detail in this volume. The role of humidity-sensitive materials in optical and fiber-optic sensors is also detailed. This volume describes the reasons for controlling the humidity, features of water and water vapors, and units used for humidity measurement.

Semiconductor Manufacturing Handbook Second Edition

Semiconductor Manufacturing Handbook  Second Edition
Author: Hwaiyu Geng
Publsiher: McGraw Hill Professional
Total Pages: 704
Release: 2017-10-06
Genre: Technology & Engineering
ISBN: 9781259583124

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Thoroughly Revised, State-of-the-Art Semiconductor Design, Manufacturing, and Operations Information Written by 70 international experts and reviewed by a seasoned technical advisory board, this fully updated resource clearly explains the cutting-edge processes used in the design and fabrication of IC chips, MEMS, sensors, and other electronic devices. Semiconductor Manufacturing Handbook, Second Edition, covers the emerging technologies that enable the Internet of Things, the Industrial Internet of Things, data analytics, artificial intelligence, augmented reality, and and smart manufacturing. You will get complete details on semiconductor fundamentals, front- and back-end processes, nanotechnology, photovoltaics, gases and chemicals, fab yield, and operations and facilities. •Nanotechnology and microsystems manufacturing •FinFET and nanoscale silicide formation •Physical design for high-performance, low-power 3D circuits •Epitaxi, anneals, RTP, and oxidation •Microlithography, etching, and ion implantations •Physical, chemical, electrochemical, and atomic layer vapor deposition •Chemical mechanical planarization •Atomic force metrology •Packaging, bonding, and interconnects •Flexible hybrid electronics •Flat-panel,flexible display electronics, and photovoltaics •Gas distribution systems •Ultrapure water and filtration •Process chemicals handling and abatement •Chemical and slurry handling systems •Yield management, CIM, and factory automation •Manufacturing execution systems •Advanced process control •Airborne molecular contamination •ESD controls in clean-room environments •Vacuum systems and RF plasma systems •IC manufacturing parts cleaning technology •Vibration and noise design •And much more

Handbook of Research on Solar Energy Systems and Technologies

Handbook of Research on Solar Energy Systems and Technologies
Author: Anwar, Sohail
Publsiher: IGI Global
Total Pages: 614
Release: 2012-08-31
Genre: Science
ISBN: 9781466619975

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The last ten years have seen rapid advances in nanoscience and nanotechnology, allowing unprecedented manipulation of the nanoscale structures controlling solar capture, conversion, and storage. Filled with cutting-edge solar energy research and reference materials, the Handbook of Research on Solar Energy Systems and Technologies serves as a one-stop resource for the latest information regarding different topical areas within solar energy. This handbook will emphasize the application of nanotechnology innovations to solar energy technologies, explore current and future developments in third generation solar cells, and provide a detailed economic analysis of solar energy applications.

Silicon Heterostructure Handbook

Silicon Heterostructure Handbook
Author: John D. Cressler
Publsiher: CRC Press
Total Pages: 1248
Release: 2018-10-03
Genre: Technology & Engineering
ISBN: 9781420026580

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An extraordinary combination of material science, manufacturing processes, and innovative thinking spurred the development of SiGe heterojunction devices that offer a wide array of functions, unprecedented levels of performance, and low manufacturing costs. While there are many books on specific aspects of Si heterostructures, the Silicon Heterostructure Handbook: Materials, Fabrication, Devices, Circuits, and Applications of SiGe and Si Strained-Layer Epitaxy is the first book to bring all aspects together in a single source. Featuring broad, comprehensive, and in-depth discussion, this handbook distills the current state of the field in areas ranging from materials to fabrication, devices, CAD, circuits, and applications. The editor includes "snapshots" of the industrial state-of-the-art for devices and circuits, presenting a novel perspective for comparing the present status with future directions in the field. With each chapter contributed by expert authors from leading industrial and research institutions worldwide, the book is unequalled not only in breadth of scope, but also in depth of coverage, timeliness of results, and authority of references. It also includes a foreword by Dr. Bernard S. Meyerson, a pioneer in SiGe technology. Containing nearly 1000 figures along with valuable appendices, the Silicon Heterostructure Handbook authoritatively surveys materials, fabrication, device physics, transistor optimization, optoelectronics components, measurement, compact modeling, circuit design, and device simulation.

Silicon Wet Bulk Micromachining for MEMS

Silicon Wet Bulk Micromachining for MEMS
Author: Prem Pal,Kazuo Sato
Publsiher: CRC Press
Total Pages: 412
Release: 2017-04-07
Genre: Science
ISBN: 9781315341279

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Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in terms of both technologies and techniques of fabrication of MEMS structures. Wet chemical–based silicon bulk micromachining continues to be a widely used technique for the fabrication of microstructures used in MEMS devices. Researchers all over the world have contributed significantly to the advancement of wet chemical–based micromachining, from understanding the etching mechanism to exploring its application to the fabrication of simple to complex MEMS structures. In addition to its various benefits, one of the unique features of wet chemical–based bulk micromachining is the ability to fabricate slanted sidewalls, such as 45° walls as micromirrors, as well as freestanding structures, such as cantilevers and diaphragms. This makes wet bulk micromachining necessary for the fabrication of structures for myriad applications. This book provides a comprehensive understating of wet bulk micromachining for the fabrication of simple to advanced microstructures for various applications in MEMS. It includes introductory to advanced concepts and covers research on basic and advanced topics on wet chemical–based silicon bulk micromachining. The book thus serves as an introductory textbook for undergraduate- and graduate-level students of physics, chemistry, electrical and electronic engineering, materials science, and engineering, as well as a comprehensive reference for researchers working or aspiring to work in the area of MEMS and for engineers working in microfabrication technology.

Handbook of Mems for Wireless and Mobile Applications

Handbook of Mems for Wireless and Mobile Applications
Author: Deepak Uttamchandani
Publsiher: Elsevier
Total Pages: 640
Release: 2013-08-31
Genre: Technology & Engineering
ISBN: 9780857098610

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The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS technologies and explores the use of these technologies over a wide range of application areas. Part one provides an introduction to the use of RF MEMS as an enabling technology for wireless applications. Chapters review RF MEMS technology and applications as a whole before moving on to describe specific technologies for wireless applications including passive components, phase shifters and antennas. Packaging and reliability of RF MEMS is also discussed. Chapters in part two focus on wireless techniques and applications of wireless MEMS including biomedical applications, such as implantable MEMS, intraocular pressure sensors and wireless drug delivery. Further chapters highlight the use of RF MEMS for automotive radar, the monitoring of telecommunications reliability using wireless MEMS and the use of optical MEMS displays in portable electronics. With its distinguished editor and international team of expert authors, the Handbook of MEMS for wireless and mobile applications is a technical resource for MEMS manufacturers, the electronics industry, and scientists, engineers and academics working on MEMS and wireless systems. Reviews the use of radio frequency (RF) MEMS as an enabling technology for wireless applications Discusses wireless techniques and applications of wireless MEMS, including biomedical applications Describes monitoring structures and the environment with wireless MEMS

MEMS and MOEMS Technology and Applications

MEMS and MOEMS Technology and Applications
Author: P. Rai-Choudhury
Publsiher: SPIE Press
Total Pages: 520
Release: 2000
Genre: Technology & Engineering
ISBN: 0819437166

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The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.